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Ultrapure Water System Produces a Maximum of 125 gpm of UPW |
Parameter | Specification | Measurement Location | Instrument or Analysis Method |
---|---|---|---|
Resistivity (% of time) | < 18.2 M-ohm-cm (100%) | On-line | Thornton 770 MAX |
TOC | <Â 2 ppb | On-line | Sievers 500RLE |
Dissolved Oxygen | < 5 ppb average 10 ppb maximum | On-line | Swan Oxytrace |
Particles | < 80 particles/liter >=0.05 micron | On-line | PMS Ultra D150 |
Bacteria | <Â 1 CFU/liter | Off-line | Low nutrient agar |
Al, Ca, Co, Cr, Cu, Fe, K, Mg, Na, Ni, Pb, Zn | <Â 5 ppt | Off-line | IC |
Boron | 0.1 ppb maximum | On-line | Sievers |
Dissolved Si as SiO2 | < 50 ppt | On-line | Swan |
The system is designed to allow for easy expansion to double the makeup rate to the ultrapure water recirculation loop.
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Modular Ultrapure Water Systems
On-line Industrial Water Treatment Catalog