As line widths in silicon chip circuitry become finer and the electrical devices become smaller, specifications for electronic rinse water requirements grow progressively more stringent. Also, the specifications of high-purity water qualities are often the limits of what is "state of the art" or attainable at a given time. Water quality is critical to the semiconductor industry, where water is used for many critical applications. Since the water is in direct contact with the semiconductor during multiple rinse steps, water quality is directly related to product quality. Nalco Pretreatment Solutions (PTS) provides, monitors, and maintains the equipment required to meet the quality of water you need for production, including low particle, TOC, boron, oxygen and bacteria water with a resistivity of 18.2 Meg-Ohm/cm2.
Nalco PTS has extensive experience applying proven technology in the semiconductor industry. Nalco PTS uses technologies such as carbon filtration, double-pass reverse osmosis, deionization, CEDI, 254 nm UV, 185 nm TOC destruct UV, nitrogen blanketed tanks, vacuum degasification, membrane filtration, and ultrafiltration produce the necessary water quality. This water often enters a large PVDF recirculation loop to various production tools in the clean room. Our single-use, PVDF-lined portable exchange systems provide high-quality water without the need for on-site regeneration, maximizing floor space usage and reducing the need for chemicals and other equipment.
